Home › Authors › Germany) IEEE Workshop on Micro Electro Mechanical Systems (11th : 1998 : Heidelberg 👤 Germany) IEEE Workshop on Micro Electro Mechanical Systems (11th : 1998 : Heidelberg 1 book Books by Germany) IEEE Workshop on Micro Electro Mechanical Systems (11th : 1998 : Heidelberg IEEE, the Eleventh Annual Inte IEEE, the Eleventh Annual International Workshop on Micro Electro Mechanical Systems 1998