Eric Peeters

Materials Science of Microelec

Materials Science of Microelectromechanical Systems Devices II

2014

Advanced DPA Theory and Practice

2013

Materials science of microelectromechanical systems (MEMS) devices II

2000

Micromachined devices and comp

Micromachined devices and components VI

2000

Micromachined devices and components V

1999

Process development for 3D sil

Process development for 3D silicon microstructures, with application to mechanical sensor devices