Home › Authors › S. Mark Spearing 👤 S. Mark Spearing 4 books Books by S. Mark Spearing Materials Science of Microelectromechanical Systems Devices III 2014 Materials Science of Microelec Materials Science of Microelectromechanical Systems Devices IV 2014 Microelectromechanical Systems Microelectromechanical Systems : Volume 1139 2014 Microelectromechanical Systems Vol. 1052 2008