G. S. Mathad

Pattern Transfer in Integrated

Pattern Transfer in Integrated Circuit Fabrication

2006

Copper Interconnects, New Contact Metal- Lurgies, & Low-k Dielectrics

2002

Thin film materials, processes and reliability

2001

Interconnect and contact metallization for ULSI

2000

Plasma etching processes for sub-quarter micron devices

2000

Proceedings of the Tenth Symposium on Plasma Processing

1994

Highly Selective Dry Etching and Damage Control (Advances in Soil Science)

1993

Proceedings of the symposia on reliability of semiconductor devices/interconnections and dielectric breakdown, and laser process for microelectronic applications

1992