Books by Harry J. Levinson
Principles of Lithography, Third Edition (SPIE Press Monograph, Vol. PM198)
Principles of Lithography, 3rd
Principles of Lithography, 3rd Ed
Optical microlithography XXII
Optical microlithography XXII
Optical microlithography XXI
Optical microlithography XXI
Principles of lithography
Principles of Lithography (SPIE PRESS Monograph Vol. PM97) (Spie Press Monograph)
Lithography process control