Home › Authors › Thomas E. Buchheit 👤 Thomas E. Buchheit 3 books Books by Thomas E. Buchheit Materials Science of Microelec Materials Science of Microelectromechanical Systems Devices IV 2014 Thin Films : Volume 875 Thin Films : Volume 875 2014 Nano and Microelectromechanical Systems (NEMS and MEMS) and Molecular Machines 2003